PHI 670 Scanning Auger Spectrometer

Specifications:

• Single-beam Auger Electron spectroscopy with cylindrical mirror analyzer
• Energy resolution of 0.5 eV from 50 eV to 5000 eV
• Sample SEM imaging with ~2 µm resolution
• Elemental depth profiling by Ar⁺ ion beam sputtering ~ 5 nm resolution
• 2D elemental mapping ~2 µm resolution
• Multi-point elemental surface analysis
• Resolution down to 0.2% atomic concentration*
• Multiple-sample manipulation
• UHV pressure < 1x10^-10 Toor

* Sensitivity is dependent on element of interest

Applications:

• Multilayered thin-films
• Electronic devices
• Conductors, semiconductors, and insulators