Description: Used to measure the substrate's surface profile. Contact is made with the stylus to measure step height, surface roughness, and curvature. Vertical range of 25 nm, for certain substrates, and up to 327 µm.
Substrate Compatibility: Varying sizes allowed, from pieces as small as 3mm by 3mm and up to 6 inch wafers, and maximum 3mm thick.
Location: Keller-Bay 1
Badger Name: K1 Surface Profiler P16 KLA-Tencor