Keyence VK-X3050 Optical Profilometer

Description

The Keyence Optical Profilometer is a highly sensitive optical instrument that uses multiple techniques to reconstruct surface features and quantify sub-surface layer thicknesses. The sample stage accommodates samples as heavy as a few kg and as large as 30 cm. The attached computer and installed software provides on-site analysis and quantification of topographic properties over ranges and paths selected by users to customize analysis both between and within samples.

Capabilities

• A variety of lenses with various magnifications: 2.5X, 5X, 10X, 20X, 50X, 150X
• Multiple measurement techniques including: Optical focus-detection, Laser-confocal microscopy, White-light interferometry based mapping.
• Sub-surface film thickness measurement and generation of cross-sectional analysis
• Automated high-magnification frame-stitching into large maps with high-resolution local topography.
• Analysis software for quantification of multiple topographic parameters such as roughness, height distribution, profiles, slopes, step height, etc.
• User-selectable analysis vectors and areas to tailor analyses to the structures of interest rather than be limited by irregularities and boundaries of complex patterns.
• High-speed data acquisition.
• Vertical resolution of ~1 nm
• Lateral resolution of ~200 nm