Photoresists

AZ1500 series

Storage: Refrigerator - chase 2
Type: Positive
Thickness Range: 0.4 - 2.8µ
Product Data Sheet: AZ1505 Product Data Sheet
MSDS: AZ1505AZ1512AZ1518
Developer: 351 Dev:H2O (1:5)
Process: RecipeSpeed vs. thickness

AZ 9260

Storage: Refrigerator - chase 2
Type: Positive
Thickness Range: 4.6 - 24µ
Product Data Sheet: PDS
MSDS: MSDS
Developer: 1:4 AZ 400K:H2O
Process: 9µm38µm

Futurrex NR 71 1500P

Storage: Wet bench - bay 2
Type: Negative
Thickness Range: 1.1 - 3.1µ
Product Data Sheet: PDS
MSDS: MSDS
Developer: Futurrex RD6
Process: RecipeSpeed vs. thickness

Futurrex NR 71 3000P

Storage: Wet bench - bay 2
Type: Negative (RIE/Ion mill)
Thickness Range: 2.1 - 6.3µ
Product Data Sheet: PDS
MSDS: MSDS
Developer: Futurrex RD6
Remover: RR41 (PDS)
Process: RecipeSpeed vs. thickness

LOR 3A

Storage: Wet bench - bay 2
Type: Lift-off
Thickness Range: 3.5 - 5.0kÅ
Product Data Sheet: PDS
MSDS: MSDS
Developer: MF CD 26
Process: S1813 LOR3A

LOR 20B

Storage: Wet bench - bay 2
Type: Lift-off
Thickness Range: 1.8 - 3.8µ
Product Data Sheet: PDS
MSDS: MSDS
Developer: 1:4 AZ 400K:H2O
Process: S1813 LOR20B

SU8 2010

Storage: Wet bench - bay 2
Type: Negative
Thickness Range: 10 - 20µ
Product Data Sheet: PDS
MSDS: MSDS
Developer: SU8 Developer PM Acetate. SU8 Developer is not provided by the MNC.
Process: Dilution Tips

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