Photoresists
AZ1500 series
Storage: Refrigerator - chase 2
Type: Positive
Thickness Range: 0.4 - 2.8µ
Product Data Sheet: AZ1505 Product Data Sheet
MSDS: AZ1505, AZ1512, AZ1518
Developer: 351 Dev:H2O (1:5)
Process: Recipe, Speed vs. thickness
AZ 10 XT
Storage: Refrigerator - chase 2
Type: Positive
Thickness Range: 4.6 - 24µ
Product Data Sheet: PDS
MSDS: MSDS
Developer: 1:4 AZ 400K:H2O
Process: 9µm, 38µm
Futurrex NR 71 1500P
Storage: Wet bench - bay 2
Type: Negative
Thickness Range: 1.1 - 3.1µ
Product Data Sheet: PDS
MSDS: MSDS
Developer: Futurrex RD6
Process: Recipe, Speed vs. thickness
Futurrex NR 71 3000P
Storage: Wet bench - bay 2
Type: Negative
Thickness Range: 2.1 - 6.3µ
Product Data Sheet: PDS
MSDS: MSDS
Developer: Futurrex RD6
Remover: RR41 (PDS)
Process: Recipe, Speed vs. thickness
LOR 3A
Storage: Wet bench - bay 2
Type: Lift-off
Thickness Range: 3.5 - 5.0kÅ
Product Data Sheet: PDS
MSDS: MSDS
Developer: MF CD 26
Process: AZ1512 LOR3A
LOR 20B
Storage: Wet bench - bay 2
Type: Lift-off
Thickness Range: 1.8 - 3.8µ
Product Data Sheet: PDS
MSDS: MSDS
Developer: 1:4 AZ 400K:H2O
Process: AZ1512 LOR20B
SU8 2010
Storage: Wet bench - bay 2
Type: Negative
Thickness Range: 10 - 20µ
Product Data Sheet: PDS
MSDS: MSDS
Developer: SU8 Developer
Process: Dilution Tips