Capabilities and Equipment
The Minnesota Nano Center (MNC) has over $30 million of equipment in place and operational for optical and electron beam lithography, thin film deposition of metals, alloys, and ceramic compounds, reactive ion and wet etching, nanoparticle synthesis, and characterization.
With its new space in the Physics and Nanotechnology Building, the MNC offers expanded facilities for research in basic nanoscience and in applied nanotechnology. These facilities will support researchers working in the three main areas of nanotechnology today: small-scale devices, nano materials, and biomedical applications of nanotech.
Making a photomasks with your device design is usually the first step in fabricating devices using photolithography. The Nano Center offers mask making services with our Heidelberg DWL200 laser writer system. The minimum feature size is 1.0µm for lines or spaces. If you would like us to make a mask, please go to https://cse.umn.edu/mnc/mask-making to submit your design file, Be sure to consult the design rules on that page. Note that you can also get training on the laserwriter tool to make your own masks. Contact MNC staff for details.
The Nano Center can characterize a wide range of particle samples for size distribution, shape analysis, and electrostatic surface charge (zeta potential). We have the tools analyze nanoparticles as small as 3 nm and powders as large as 2 mm in diameter. Samples can be dry or suspended in liquids, and we can accommodate oxygen- and water-sensitive materials. For more information, contact the Nanobio Lab manager at firstname.lastname@example.org.