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  1. Home
  2. Equipment in Keller

Equipment in Keller

More About Keller - Area 1

  • Dicing Saw
  • Graphene Deposition
  • Minibrute Furnace

More About Keller - Area 2

  • CV-IV (Capacitance-Voltage and Current Voltage) Measurement System
  • Thermal Evaporator

More About Keller - Area 3

  • SEM (Scanning Electron Microscope)-JEOL 6610-Keller

More About Keller - Bay 1

  • ALD (Atomic Layer Deposition) Ultratech Savannah-Thermal
  • Atomic Force Microscope - Keller
  • Film Stress Measurement (FSM)
  • Filmetrics-Film Thickness
  • Four Point Probe
  • Gaertner-Ellipsometer
  • P16-Surface Profiler
  • RTA (Rapid Thermal Annealer)
  • Spin Rinse Dryer
  • Tylan-Oxidation Tube
  • UV-Ozone Cleaner
  • Wafer Bonder
  • Woolam-Ellipsometer
  • Zoom Scope

More About Keller - Bay 2

  • Apogee Spinner CEE3-Keller
  • Asher-Oxygen Etcher
  • Canon Stepper
  • Contact Aligner Ma6-Keller
  • Contact Aligner MaBa6-Keller
  • Developer Spinner CEE1
  • Headway Spinner
  • Hotplates-Keller
  • Image Reversal Oven
  • Ovens-Keller
  • Spin Rinse Dryer
  • Spinner CEE1-Keller
  • Spinner CEE2-Keller

More About Keller - Bay 3

  • AJA1 Sputterer - Keller
  • AV2 Etcher-Keller
  • Keyence-Scope
  • Oriel-Flood Exposure
  • Parylene Deposition System
  • PECVD (Plasma Enhanced Chemical Vapor Deposition)
  • Spin Rinse Dryer
  • Temescal Evaporator
  • Varian Evaporator
  • XeF2 Etcher

Minnesota Nano Center

Address: 115 Union St SE, 140 Physics & Nanotechnology Building, Minneapolis MN 55455
Phone: (612) 624-8005
Fax: (612) 625-5012
Email: mnc@umn.edu

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