Equipment in Keller

More About Keller - Area 1

• Dicing Saw
• Graphene Deposition
• Minibrute Furnace

More About Keller - Area 2

• CV-IV (Capacitance-Voltage and Current Voltage) Measurement System
• Thermal Evaporator

More About Keller - Area 3

• SEM (Scanning Electron Microscope)-JEOL 6610-Keller

More About Keller - Bay 1

• ALD (Atomic Layer Deposition) Ultratech Savannah-Thermal
• Atomic Force Microscope - Keller
• Film Stress Measurement (FSM)
• Filmetrics-Film Thickness
• Four Point Probe
• Gaertner-Ellipsometer
• P16-Surface Profiler
• RTA (Rapid Thermal Annealer)
• Spin Rinse Dryer
• Tylan-Oxidation Tube
• UV-Ozone Cleaner
• Wafer Bonder
• Woolam-Ellipsometer
• Zoom Scope

More About Keller - Bay 2

• Apogee Spinner CEE3-Keller
• Asher-Oxygen Etcher
• Canon Stepper
• Contact Aligner Ma6-Keller
• Contact Aligner MaBa6-Keller
• Developer Spinner CEE1
• Headway Spinner
• Hotplates-Keller
• Image Reversal Oven
• Ovens-Keller
• Spin Rinse Dryer
• Spinner CEE1-Keller
• Spinner CEE2-Keller

More About Keller - Bay 3

• AJA1 Sputterer - Keller
• AV2 Etcher-Keller
• Keyence-Scope
• Oriel-Flood Exposure
• Parylene Deposition System
• PECVD (Plasma Enhanced Chemical Vapor Deposition)
• Spin Rinse Dryer
• Temescal Evaporator
• Varian Evaporator
• XeF2 Etcher