UV-Ozone Cleaner
Type: Etcher
Description: Uses ultraviolet light and ozone to clean organic material from the substrates surface.
Substrate Compatibility: Varying sizes allowed, from pieces, all the way up to 6 inch wafers.
Location: Keller-Bay 1
Badger Name: K1 Etcher UV Ozone
Training: Review the SOP prior to requesting training.
