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  2. Filmetrics-Film Thickness

Filmetrics-Film Thickness

Type: Characterization

Description: Optical measuring system to measure film thickness of transparent or thin opaque layers. Has automated stage and wafer mapping. Thickness range as low as 150 Å and up to 250 µm.

Substrate Compatibility: Varying sizes allowed, from pieces, all the way up to 6 inch wafers.

Location: Keller-Bay 1

Badger Name: K1 Film Thickness Filmetrics

Training: Watch training video and review SOP prior to requesting training.

Filmetrics-Film Thickness

More About Characterization

  • Analytical Ultracentrifuge
  • Atomic Force Microscope - Keller
  • Atomic Force Microscope - PAN
  • Characterization Tools
  • Confocal Scope
  • CV-IV (Capacitance-Voltage and Current Voltage) Measurement System
  • FilmSense-Film Thickness
  • Four Point Probe
  • Gaertner-Ellipsometer
  • Keyence VK-X3050 Profilometer
  • NanoDrop One C UV-Vis Spectrophotometer
  • Nanospec
  • P7-Surface Profiler
  • Rudolph-Ellipsometer
  • SEM (Scanning Electron Microscope) Sputterer
  • SEM (Scanning Electron Microscope)-JEOL 6610-Keller
  • SEM (Scanning Electron Microscope)-JEOL 6700-PAN
  • Woolam-Ellipsometer
  • Zoom Scope

More About Equipment - F

  • Equipment A-Z
  • FilmSense-Film Thickness
  • Four Point Probe

More About Keller - Bay 1

  • ALD (Atomic Layer Deposition) Ultratech Savannah-Thermal
  • Atomic Force Microscope - Keller
  • Equipment in Keller
  • Four Point Probe
  • Gaertner-Ellipsometer
  • P7-Surface Profiler
  • RTA (Rapid Thermal Annealer)
  • Spin Rinse Dryer
  • Tylan-Oxidation Tube
  • UV-Ozone Cleaner
  • Wafer Bonder
  • Woolam-Ellipsometer
  • Zoom Scope

Minnesota Nano Center

Address: 115 Union St SE, 140 Physics & Nanotechnology Building, Minneapolis MN 55455
Phone: (612) 624-8005
Fax: (612) 625-5012
Email: [email protected]

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