Filmetrics-Film Thickness

Type: Characterization

Description: Optical measuring system to measure film thickness of transparent or thin opaque layers. Has automated stage and wafer mapping. Thickness range as low as 150 Å and up to 250 µm.

Substrate Compatibility: Varying sizes allowed, from pieces, all the way up to 6 inch wafers.

Location: Keller-Bay 1

Badger Name: K1 Film Thickness Filmetrics

Training: Watch training video and review SOP prior to requesting training.