Filmetrics-Film Thickness
Type: Characterization
Description: Optical measuring system to measure film thickness of transparent or thin opaque layers. Has automated stage and wafer mapping. Thickness range as low as 150 Å and up to 250 µm.
Substrate Compatibility: Varying sizes allowed, from pieces, all the way up to 6 inch wafers.
Location: Keller-Bay 1
Badger Name: K1 Film Thickness Filmetrics
Training: Watch training video and review SOP prior to requesting training.
