SEM (Scanning Electron Microscope)-JEOL 6700-PAN
Type: Characterization
Description: The JEOL 6700 FE SEM is a field-emission scanning electron microscope (FE SEM) which utilizes a cold emission source. It can image features down to the 5 to 10nm range.
Substrate Compatibility: Varying sizes allowed, from pieces, all the way up to 4 inch wafers.
Location: PAN-Bay 5
Badger Name: P5 SEM 6700 JEOL
Training: Review SOP prior to requesting training.
