SEM (Scanning Electron Microscope) Sputterer

Type: Characterization

Description: The SEM sputterer (aka Cressington sputter coater) is used to deposit very thin (3-5 nm) gold films on samples to reduce charging during SEM imaging or electron-beam lithography.

Substrate Compatibility: Varying sizes allowed, from pieces, all the way up to 4 inch wafers.

Location: PAN-Bay 5

Badger Name: P5 SEM Sputterer

Training: A general JOEL SEM 6700 short course will include training on this tool. Review SOP prior to requesting training.