Confocal Scope
Type: Characterization
Description: Optical profiler designed for fast and non-invasive inspection and measurement of the 3-dimensional geometry of probe marks, probe cards, MEMS, micro lenses and similar micro and nano engineered or precision-machined structures.
Substrate Compatibility: Varying sizes allowed, from pieces, all the way up to 8 inch wafers.
Location: PAN-Bay 4
Badge Name: P4 Scope Confocal HS200A
Training: Review the SOP prior to requesting training.
