Confocal Scope

Type: Characterization

Description: Optical profiler designed for fast and non-invasive inspection and measurement of the 3-dimensional geometry of probe marks, probe cards, MEMS, micro lenses and similar micro and nano engineered or precision-machined structures.

Substrate Compatibility: Varying sizes allowed, from pieces, all the way up to 8 inch wafers.

Location: PAN-Bay 4

Badge Name: P4 Scope Confocal HS200A

Training: Review the SOP prior to requesting training.