CHA Evaporator
Type: Deposition-PVD
Description: Electron beam evaporator can run 6 different materials in a run.
Films: Ag, Al, Au, AuPd, Co, Cr, Cu, Fe, Ge, Mn, Mo, Ni, Pd, Pt, Ti
Substrate Compatibility: 4 inch wafers only. 6 inch wafers when approved by staff.
Location: PAN-Bay 3
Badger Name: P3 Evaporator CHA
Supplemental Material: Changing fixtures, Materials, Metal step coverage example
Training: Watch training video and review SOP prior to requesting training.
