CHA Evaporator

Type: Deposition-PVD

Description: Electron beam evaporator can run 6 different materials in a run.

Films: Ag, Al, Au, AuPd, Co, Cr, Cu, Fe, Ge, Mn, Mo, Ni, Pd, Pt, Ti

Substrate Compatibility: 4 inch wafers only. 6 inch wafers when approved by staff.

Location: PAN-Bay 3

Badger Name: P3 Evaporator CHA

Supplemental Material: Changing fixturesMaterialsMetal step coverage example

Training: Watch training video and review SOP prior to requesting training.