Transition Metal Dichalcogenide (TMD) 2D Film
Type: Deposition-CVD
Description: The Planartech CVD tool consists of 2 furnace tubes with a connecting load-lock transfer mechanism for moving samples between the tubes without exposure to air.
Films: Currently the tubes are set up for growth of 2D transition metal dichalcogenides films of MoS2 and WSe films.
Substrate Compatibility: Pieces, no bigger than a 2 inch wafer.
Location: PAN-Bay 1
Badger Name: P1 CVD 2D Film Dep Planartech
Training: Review the SOP prior to requesting training.
