Transition Metal Dichalcogenide (TMD) 2D Film

Type: Deposition-CVD

Description: The Planartech CVD tool consists of 2 furnace tubes with a connecting load-lock transfer mechanism for moving samples between the tubes without exposure to air.

Films: Currently the tubes are set up for growth of 2D transition metal dichalcogenides films of MoS2 and WSe films.

Substrate Compatibility: Pieces, no bigger than a 2 inch wafer.

Location: PAN-Bay 1

Badger Name: P1 CVD 2D Film Dep Planartech

Training: Review the SOP prior to requesting training.