Parylene Deposition System

Type: Deposition-PVD

Description: Parylene, a polymer, deposits in a vapor form at room temperature under vacuum conditions. If forms a conformal coating on all exposed surfaces. Capable of thicknesses as little as a couple 100 nm, up to 100 µm.

Substrate Compatibility: Varying sizes allowed, from pieces, all the way up to 8 inch wafers.

Location: Keller-Bay 3

Badger Name: K3 Parylene Dep Labcoter SCS

Training: Review SOP prior to requesting training.