Parylene Deposition System
Description: Parylene, a polymer, deposits in a vapor form at room temperature under vacuum conditions. If forms a conformal coating on all exposed surfaces. Capable of thicknesses as little as a couple 100 nm, up to 100 µm.
Substrate Compatibility: Varying sizes allowed, from pieces, all the way up to 8 inch wafers.
Location: Keller-Bay 3
Badger Name: K3 Parylene Dep Labcoter SCS