SEM (Scanning Electron Microscope)-JEOL 6610-Keller

Type: Characterization

Description: The JSM-6610LV is a scanning electron microscope (SEM) comprised of a tungsten electron column and an Oxford Instruments Inca X-Act EDS. It can image and analyze a wide range of conducting and non-conducting samples, as well as provide compositional information using the EDS.

Substrate Compatibility: Varying sizes allowed, from pieces, all the way up to 4 inch wafers.

Location: Keller-Bay 3

Badger Name: KA3 SEM JSM-6610LV JEOL

Training: Review SOP prior to requesting training.