Thermal Evaporator
Type: Deposition-PVD
Description: Metal evaporation system.
Films: Ag, Al, Au, Cr, Cu, Ti
Substrate Compatibility: Varying sizes allowed, from pieces, all the way up to 4 inch wafers.
Location: Keller-Area 2
Badger Name: KA2 Evaporator Thermal
Training: Review the SOP prior to requesting training.