Critical Point (CP) Dryer
Description: Capable of drying with a lack of a liquid/vapor stage. This allows for the minimizing of stiction in beam release.
Substrate Compatibility: Varying sizes allowed, from pieces as small as 1 cm by 1 cm and up to 6 inch wafers.
Location: PAN-Bay 2
Badger Name: P2 Etcher CP Dryer Tousimis