Keyence VK-X3050 Profilometer

Type: Characterization

Description:The VK-X3050 3D Surface Profiler combines laser confocal profilometry, white light interferometry, and optical focal plane stacking to provide a variety of techniques for imaging, mapping, and 3D profilometry of a wide variety of sources by using non-contact optical methods. This tool provides high-accuracy measurement and analysis can be performed on any target, including those with transparent or mirrored surfaces, large height changes, or steep angles.

Substrate Compatibility: Varying sizes allowed, from pieces, all the way up to 12 inch wafers.

Location: PAN-Bay 4

Badger Name: P4 Keyence VK-X3050 Profilometer 

Training: Request training.

Image of Keyence Profilometer on the table inside of the cleanroom in PAN Bay 4.