Picomaster 200

Type: Photolithography

Description: This direct-write laser lithography tool is configured with backside alignment, dual laser sources (375 and 405 nm), and multiple write-heads that enable a wide range of pattern requirements to be written onto prepared substrates. The Picomaster combines high write-speed with a resolution limit of 0.3 µm, providing new capabilities for direct-write of high resolution grayscale patterns (3D lithography).

Substrate Compatibility: up to 8" wafers, including piece parts

Location: PAN-Bay 4

Badger Name: P4 Raith Picomaster

Supplemental Material: Coming soon.

Training: SOP coming soon, requesting training.