Image Reversal Oven

Type: Photolithography

Description: An oven with anhydrous ammonia gas used with positive photoresist to switch polarity. This is beneficial for control of photoresist side walls, in particular for lift off.

Substrate Compatibility: Varying sizes allowed, from pieces, all the way up to 6 inch wafers. 

Location: Keller-Bay 2

Badger Name: K2 Image Reversal Oven YES Eng

Training: Review SOP prior to requesting training.