Image Reversal Oven
Type: Photolithography
Description: An oven with anhydrous ammonia gas used with positive photoresist to switch polarity. This is beneficial for control of photoresist side walls, in particular for lift off.
Substrate Compatibility: Varying sizes allowed, from pieces, all the way up to 6 inch wafers.
Location: Keller-Bay 2
Badger Name: K2 Image Reversal Oven YES Eng
Training: Review SOP prior to requesting training.
