Type: Thermal

Description: The ceramic top hot plate has a closed loop feedback control, which will accurately maintain temperature ± 10°C for a 2” diameter area at the center of the hotplate. Temperature stability at the center of the top plate surface is ± 1.0°C.

Location: Keller-Bay 2

Badger Name: N/A

Training: A general photolithography short course will include training on this tool. Request training here. There is no separate SOP for this tool.