PHI 5000 VersaProbe III Photoelectron Spectrometer


  • Variable Al Ka X-ray spot sizes adjustable from 10 µm through 200 µm
  • Scanning XPS with the dimension up to 1.4 mm.
  • Angle resolve XPS analysis.
  • Angle resolved XPS analysis.
  • Ultraviolet photoelectron spectroscopy (UPS).
  • Gas cluster ion beam (GCIB) system.
  • Variable temperature stage up to 800 C.
  • Inert gas or vacuum sample transfer vessel.