Tencor P10 Profilometer

Description:

The profiler is a computerized, highly sensitive surface profiler that measures roughmess, waviness, step height, and other surface characteristics in a variety of applications.  It features the ability to measure micro-roughness with up to 0.5 Å (0.002 µin.) resolution over short distances as well as waviness over a full, 60 mm (2 inch) maximum scan length.  The built-in PC computing power offers precise, automatic measurement capability with the convenience and ease of use of Microsoft Windows based software control and data analysis.

Applications:

• Semi-conducter wafers.
• Thin-film heads.
• Precision-machined and polished surfaces.
• Ceramics for micro-electronics.
• Glass for flat panel displays.
• Optical Surfaces.
• Polymers.

Capabilities:

• Vertical range for the optional Low-Force MicroHead II is from under 50 Å to 130µm at <0.1-, and 1-Å verical data resolution.
• Photo-realistic rendering of the scan data in three dimensions for extended surface analysis.
• A virually unlimited number of data points per profile, which guarantees that the horizontal resolution is limited by the stylus radius and not by the number of data points.
• Measurement of many roughness and waviness parameters, with user selectable cutoff filters to isolate roughness and waviness.
• Ability to fit and level a scan, allowing accurate step height measurements on curved surfaces.
• Ability to detect the edge or apex of a profile feature, allowing automated data analysis relative to the feature.
• Ability to repeat a scan up to ten times and automatically calculate the average, thereby minimizing the effects of environmental noise on measurements.
• Automatic positioning on the sample surface to within a few microns in X and Y.
• Precision mode, allowing precise location of small features and de-skew coordinates for automatic operation.
• Measurement of samples up to 350 mm (14 in.) wide, 57.2 mm (2.25 in.) thick, and 2.2 kg (5 lb) in weight.

Specifications:

• Vertical range from under 50 Å to 130µm at <0.1-, and 1-Å vertical data resolution.
• Photo-realistic rendering of the scan data in three dimensions.
• Measurement of many roughness and waviness parameters.
• Ability to fit and level a scan, allowing accurate step height measurements on curved surfaces.
• Ability to detect the edge or apex of a profile feature, allowing automated data analysis relative to the feature.
• Samples up to 350 mm (14 in.) wide, 57.2 mm (2.25 in.) thick, and 2.2 kg (5 lb) in weight