Device Fabrication Focus Area
Microelectronic Device Fabrication
Microlithography and micro-device fabrication have been at the core of our work for decades.
Microlithography and micro-device fabrication have been at the core of our work for decades.
The Minnesota Nano Center (MNC) at the University of Minnesota maintains two class 100 cleanrooms and a full tool set for advanced micro- and nanolithography. The Center recently added powerful new tools for high resolution lithography capable of making features as small as 10 nanometers. Recent device fabrication projects include
- Integrated circuits
- Microelectromechanical systems (MEMS)
- Micro-optical systems
- Microfluidic systems
- Chemical sensors
- Biomedical devices
